Lithography and nanofabrication

Lithography and nanofabrication is used to produce micro and nano scale devices for a wide variety of applications such as biosensors, waveguides, micro electromechanical systems (MEMS) and microfluidics. A combination of lithography, deposition and etching can create all kinds of intricate structures.

We help with designing, patterning and fabricating your devices for rapid prototyping and proof-of-principle development. Our advanced range of lithography and nanofabrication tools can produce anything from thin film transistors to lab-on-a-chip systems.

Microfluidic and nanofluidic channels patterned using electron beam lithography and nanofabrication
Electron beam lithography

Electron beam lithography

Overcome the diffraction limit to produce nano-scale features. Small feature sizes maximise substrate use, and often correlate with high power efficiency and high operating frequency for your devices.

Raith Elphy Quantum

  • Flexible and affordable solution for rapid prototyping of simple devices using a scanning electron microscope.
  • Tungsten (W) filament for patterning features greater than 100 nanometers.

Optical lithography may be used for high-throughput patterning of micro scale structures.

Mask aligner

  • Full wafer UV illumination through a mask for fast, repeatable exposures.
  • Single micron resolution with vacuum contact.

Laser writer

  • Direct write optical lithography solution with no need for a mask.
  • Single micron resolution with 0.25 micron alignment accuracy for overlaying multiple exposures with previously fabricated structures.

Device fabrication is achieved using a variety of deposition methods capable of processing any material you need. Structures are defined using the lift-off process or etching.

  • Magnetron sputtering, both RF and DC.
  • Thermal evaporation.
  • Reactive ion etching, and deep reactive ion etching.
  • Wet etching.
EM Analytical

Providing advanced imaging and characterisation services

Located at Alderley Park – The largest science park in the North West of England.

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